The CMPure CMPD advanced melt blown depth cartridges are specifically optimized for CMP slurry systems resulting in highly consistent and repeatable filter performance.  CMPD filters feature our proprietary CoLD fiber melt blowing technology, which integrates Co-Located Large Dia­meter fibers within the fine fiber matrix to produce a rigid structural network to the cartridge. As a result, CMPD filters provide outstanding structural strength, resistance to contaminant unloading and exception­ally long service life.

• All polypropylene construction
• Continuous gradient pore structure for built-in prefiltration
• Compatible with metal (W, Cu, Al), oxide and STI slurries
• Available also as disposable filter capsules


For detailed information about this product, please refer to the data sheet. (To download this data sheet, select Download PDF in the left sidebar.)